Compound type microscope

Details Compound type microscope Compound type microscope

1992-07-29

1994-11-01

Dzierzynski, Paul M.

Radiant energy

Inspection of solids or liquids by charged particles

250307, 250216, H01J 3726

Patent

active

053609778

ABSTRACT:
A compound type microscope is provided which can observe the measurement sample of an atomic force microscope (AFM) by means of an optical microscope. This compound type microscope is comprised of an optical microscope having an objective and an observation optical system, a cantilever having a reflecting surface and detecting an atomic force, an irradiating optical system for applying a spotlight to the cantilver, a detector for detecting the displacement of reflected light caused by the displacement of the cantilever, and a sample stage for placing a sample thereon. The arrangement can be designed to accommodate the use of a scanning tunnel type microscope (STM) interchangeably with the AFM so that the sample can be measured by the STM instead of by the AFM. To this end, the probe of the STM can be detachably mountable coaxially with respect to the objective of the optical microscope, whereby the probe of the STM and the cantilever of the AFM can be selectively disposed below the objective.

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Patent Abstracts of Japan, vol. 12, No. 264 (P-734), Jul. 23, 1988.
Meyer, G. et al., "Optical-Beam-Deflection Atomic Force Microscopy: The NaCl (001) Surface", Applied Physics Letters, vol. 56, No. 21 (1990), pp. 2100-2101.

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