Composition for stripping and stripping method

Details Composition for stripping and stripping method Composition for stripping and stripping method

2011-06-28

2011-06-28

Webb, Gregory E (Department: 1761)

Cleaning compositions for solid surfaces, auxiliary compositions

Cleaning compositions or processes of preparing

For cleaning a specific substrate or removing a specific...

C510S499000

Reexamination Certificate

active

07968507

ABSTRACT:
The present invention provides a stripping composition and a stripping method capable of easily stripping a color resist or an organic insulating film formed on a substrate to reuse the substrate when defects are found during a process of forming the color filter or organic insulating film on the substrate. In one embodiment, the stripping composition includes about 0.5 to about 45 wt % of hydroxide compound, about 10 to about 89 wt % of alkyleneglycolalkylether compound, about 5 to about 45 wt % of alkanolamine compound, and about 0.01 to about 5 wt % of inorganic salt compound. Advantageously, the stripping process can be performed without damaging a thin film transistor of a bottom substrate while removing the color resist or organic insulating film.

REFERENCES:
patent: 4904571 (1990-02-01), Miyashita et al.
patent: 5795702 (1998-08-01), Tanabe et al.
patent: 7442675 (2008-10-01), Yokoi et al.
patent: 2003/0181344 (2003-09-01), Ikemoto et al.
patent: 2005/0287480 (2005-12-01), Takashima

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