Composition for removing photoresist and method of...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making

Reexamination Certificate

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C430S311000, C430S312000, C430S317000, C430S318000, C430S319000, C430S329000, C430S331000

Reexamination Certificate

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08084184

ABSTRACT:
A composition for removing a photoresist includes a) an amine compound having a cyclic amine and/or a diamine, b) a glycol ether compound, c) a corrosion inhibitor and d) a polar solvent. The composition further includes a stripping promoter. Further disclosed is a method of manufacturing an array substrate using the composition for removing a photoresist.

REFERENCES:
patent: 6638694 (2003-10-01), Ikemoto et al.
patent: 6744486 (2004-06-01), Kim et al.
patent: 7049275 (2006-05-01), Ikemoto et al.
patent: 7071045 (2006-07-01), Wu et al.
patent: 7125756 (2006-10-01), Oh et al.
patent: 7279370 (2007-10-01), Lim et al.
patent: 7723280 (2010-05-01), Brainard et al.
patent: 7772174 (2010-08-01), Satoh
patent: WO 2005035828 (2005-04-01), None

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