Composition for forming an electrically conductive layer to be u

Details Composition for forming an electrically conductive layer to be u Composition for forming an electrically conductive layer to be u

1995-06-06

1998-02-24

Lesmes, George F.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Forming nonplanar surface

430325, 430327, 430330, 430296, 4302731, 430942, 15665911, 15666111, 216 41, 216 49, 437 20, 437931, G03C 500, B44C 122

Patent

active

057210918

ABSTRACT:
A composition for forming an electrically conductive layer which is used in patterning of a resist with electric charge beam, which comprises:

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