Organic compounds -- part of the class 532-570 series – Organic compounds – Silicon containing
Reexamination Certificate
2004-06-17
2009-10-13
Price, Elvis O (Department: 1621)
Organic compounds -- part of the class 532-570 series
Organic compounds
Silicon containing
Reexamination Certificate
active
07601860
ABSTRACT:
Silicon precursors for forming silicon-containing films in the manufacture of semiconductor devices, such as films including silicon carbonitride, silicon oxycarbonitride, and silicon nitride (Si3N4), and a method of depositing the silicon precursors on substrates using low temperature (e.g., <550° C.) chemical vapor deposition processes, for fabrication of ULSI devices and device structures.
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Baum Thomas H.
Chen Tianniu
Hendrix Bryan
Roeder Jeffrey
Wang Ziyun
Advanced Technology & Materials Inc.
Chappuis Maggie
Hultquist Steven J.
Intellectual Property / Technology Law
Price Elvis O
LandOfFree
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