Composite scanning tunneling microscope

Details Composite scanning tunneling microscope Composite scanning tunneling microscope

1990-07-05

1992-08-25

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

2504421, H01J 3700

Patent

active

051421453

ABSTRACT:
A composite apparatus including a scanning tunneling microscope linked to an optical microscope or electron microscope, wherein the focal length obtained while observing the surface of a sample with the optical or electron microscope or SEM sample is recorded, and, based on this length, the speed (hereinafter referred to as the Z crude drive) at which the gap between the STM needle and the sample approaches the tunneling region (approximately 10.ANG.) is controlled and the calibration throughput is improved.

REFERENCES:
patent: 4837435 (1989-06-01), Sakuhara et al.
patent: 4866271 (1989-09-01), Ono et al.
patent: 4874945 (1989-10-01), Ohi
patent: 4914293 (1990-04-01), Hayashi et al.
patent: 4999495 (1991-03-01), Miyota et al.

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