Compliant wirebond pedestal

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material

Reexamination Certificate

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Details

C257S786000

Reexamination Certificate

active

11096410

ABSTRACT:
A wire bonder (900) with a rigid pedestal (902) having resilient inserts (920). A package (904) placed on the pedestal (902) contains an electrical device (906). The bond pads on the electrical device (906) are electrically connected to bond pads on the package (904) by a series of bond wires (908) through use of a well know bonding process. A vacuum source holds the package (904) against the pedestal (902) deforming the resilient strips (920) located in the rigid member (902) of the pedestal and ensuring good contact between the ground pads of the package (904) and conductive resilient members (920). The resilient members (920) are conductive and electrically connect the package grounds to a system ground (922).

REFERENCES:
patent: 4143868 (1979-03-01), Bergman
patent: 5324012 (1994-06-01), Aoyama et al.
patent: 5496775 (1996-03-01), Brooks
patent: 5639694 (1997-06-01), Diffenderfer et al.
patent: 5661089 (1997-08-01), Wilson
patent: 5686353 (1997-11-01), Yagi et al.
patent: 6039831 (2000-03-01), Mine et al.
patent: 6048254 (2000-04-01), Duescher
patent: 6085962 (2000-07-01), Jacobson et al.
patent: 6169330 (2001-01-01), Pankove

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