Combined wafer support and temperature monitoring device

Details Combined wafer support and temperature monitoring device Combined wafer support and temperature monitoring device

1991-03-04

1994-10-18

Walsh, Donald P.

Batteries: thermoelectric and photoelectric

Thermoelectric

Having housing, mounting or support

136231, 374179, 374208, H01L 3502

Patent

active

053564863

ABSTRACT:
A combined wafer support and thermocouple assembly comprising a wafer support basket having a plurality of wafer support fingers, one of which includes a low mass, low heat constant support for supporting a thermocouple against the backside of a wafer positioned on the basket.

REFERENCES:
patent: 4951601 (1990-08-01), Maydan
patent: 5098198 (1992-03-01), Nulman et al.
patent: 5106200 (1992-04-01), Hosokawa

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