Combined spatial filter and relay systems in rotating...

Details Combined spatial filter and relay systems in rotating... Combined spatial filter and relay systems in rotating...

2007-07-17

2007-07-17

Chowdhury, Tarifur (Department: 2886)

Optics: measuring and testing

By polarized light examination

Of surface reflection

Reexamination Certificate

active

11284213

ABSTRACT:
Low aberration relay systems modified to perform as spatial filters in rotating compensator ellipsometer, polarimeter and the like systems.

REFERENCES:
patent: 548495 (1895-10-01), Abbe
patent: 2447828 (1948-08-01), West
patent: 3748015 (1973-07-01), Offner
patent: 3817624 (1974-06-01), Martin
patent: 4053232 (1977-10-01), Dill et al.
patent: 4054812 (1977-10-01), Lessner et al.
patent: 4176951 (1979-12-01), Robert et al.
patent: 4179217 (1979-12-01), Robert et al.
patent: 4322165 (1982-03-01), Ellebracht et al.
patent: 4556292 (1985-12-01), Mathyssek et al.
patent: 4668086 (1987-05-01), Redner
patent: 4770895 (1988-09-01), Hartley
patent: 4772104 (1988-09-01), Buhrer
patent: 4875773 (1989-10-01), Burns et al.
patent: 4917461 (1990-04-01), Goldstein
patent: 4961634 (1990-10-01), Chipman
patent: 5016980 (1991-05-01), Waldron
patent: 5091320 (1992-02-01), Aspnes et al.
patent: 5166752 (1992-11-01), Spanier et al.
patent: 5229833 (1993-07-01), Stewart
patent: 5329357 (1994-07-01), Bernoux et al.
patent: 5373359 (1994-12-01), Woollam et al.
patent: 5475525 (1995-12-01), Tournois et al.
patent: 5504582 (1996-04-01), Johs et al.
patent: 5521706 (1996-05-01), Green et al.
patent: 5581350 (1996-12-01), Chen et al.
patent: 5596406 (1997-01-01), Rosencwaig et al.
patent: 5608526 (1997-03-01), Piwonka-Corle et al.
patent: 5666201 (1997-09-01), Johs
patent: 5706212 (1998-01-01), Thompson et al.
patent: 5713364 (1998-02-01), DeBaryshe et al.
patent: 5793480 (1998-08-01), Lacey et al.
patent: 5818596 (1998-10-01), Imai et al.
patent: 5859424 (1999-01-01), Norton et al.
patent: 5872630 (1999-02-01), Johs et al.
patent: 5877859 (1999-03-01), Aspnes et al.
patent: 5910842 (1999-06-01), Piwonka-Corle et al.
patent: 5917594 (1999-06-01), Norton
patent: 5929995 (1999-07-01), Johs
patent: 5946098 (1999-08-01), Johs et al.
patent: 5963325 (1999-10-01), Johs et al.
patent: 5973787 (1999-10-01), Aspnes et al.
patent: 6031619 (2000-02-01), Wilkens et al.
patent: 6034777 (2000-03-01), Johs et al.
patent: 6084674 (2000-07-01), Johs et al.
patent: 6084675 (2000-07-01), Herzinger et al.
patent: 6100981 (2000-08-01), Johs et al.
patent: 6118537 (2000-09-01), Johs et al.
patent: 6134012 (2000-10-01), Aspnes et al.
patent: 6141102 (2000-10-01), Johs et al.
patent: 6181421 (2001-01-01), Aspnes et al.
patent: 6320657 (2001-11-01), Aspnes et al.
patent: 6353477 (2002-03-01), Johs et al.
patent: 6414302 (2002-07-01), Freeouf
patent: 6493097 (2002-12-01), Ivarsson
patent: 6545758 (2003-04-01), Sandstrom
patent: 6587282 (2003-07-01), Wang et al.
patent: 6734967 (2004-05-01), Piwonka-Corle et al.
patent: 6822738 (2004-11-01), Johs et al.
patent: 2002/0101587 (2002-08-01), Wilson et al.
patent: 2002/0149774 (2002-10-01), McAninch
patent: 2003/0071996 (2003-04-01), Wang et al.
patent: 2003/0150997 (2003-08-01), Eckert et al.
patent: 2005/0286047 (2005-12-01), Boege
WO 01/90687 A2, Thermawave.
WO 01/086257.
J.A. Woollam Co. Flyer on VUV-VASE.

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