Combined scanning probe and scanning energy microscope

Details Combined scanning probe and scanning energy microscope Combined scanning probe and scanning energy microscope

1995-03-28

1996-12-03

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

250307, 73105, H01J 3726, G01B 528

Patent

active

055810829

ABSTRACT:
A combined scanning probe and scanning energy microscope, in which the same scanning system is used for both the scanning probe and scanning energy images. A sample is translated substantially along a horizontal plane either between or below the probe of a scanning probe microscope and the objective of a scanning energy microscope. The probe collects topographic or other information. The objective focuses a fixed beam of energy to a small spot on the sample, then collects energy from the same spot and transmits it to a detector. A vertical translator connected to the probe or sample support provides the vertical motion necessary to maintain them in close proximity. The images produced by the two microscopes are in substantial direct registration with each other. The invention is exemplified by a combined atomic force and confocal laser scanning microscope with a translated sample.

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