Combination apparatus having a scanning electron microscope ther

Details Combination apparatus having a scanning electron microscope ther Combination apparatus having a scanning electron microscope ther

1991-06-12

1993-07-20

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

250310, 250396R, H01J 3700, H01J 3712, H01J 3726

Patent

active

052296075

ABSTRACT:
A combination apparatus having a scanning electron microscope includes equipment for performing any of observing, measuring and processing operations on a sample placed in a sample chamber. The sample chamber contains a focused electron beam irradiating unit apart from the components for performing the observing, measuring and processing operations. The focused electron beam irradiating unit irradiates a finely focused electron beam onto the surface of the sample for electron microscopic observation in scanning fashion. This setup allows the observing, measuring or processing equipment to combine with the scanning electron microscope without appreciably enlarging the construction of the combination apparatus.

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Gerber et al., "Scanning tunneling microscope combined with a scanning electron microscope"; Rev. Sci. Instrum. 57(2), Feb. 1986; pp. 221-224.

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