Coating solution for forming high dielectric constant thin...

Details Coating solution for forming high dielectric constant thin... Coating solution for forming high dielectric constant thin...

2006-10-03

2009-06-02

Brunsman, David M (Department: 1793)

Compositions: coating or plastic

Coating or plastic compositions

Heavy metal compound containing

Reexamination Certificate

active

07540913

ABSTRACT:
Disclosed herein are a coating solution for the formation of a dielectric thin film and a method for the formation of a dielectric thin film using the coating solution. The coating solution comprises a titanium alkoxide, a β-diketone or its derivative, and a benzoic acid derivative having an electron donating group. The method comprises spin coating the coating solution on a substrate to form a thin film and drying the thin film at a low temperature to crystallize the thin film. The titanium-containing coating solution is highly stable. In addition, the coating solution enables formation of a thin film, regardless of the kind of substrates, and can be used to form dielectric thin films in an in-line mode in the production processes of PCBs.

REFERENCES:
patent: 5593495 (1997-01-01), Masuda et al.
patent: 5776788 (1998-07-01), Aoki et al.
patent: 2008/0090006 (2008-04-01), Yoshinaka et al.
patent: 7-37422 (1995-02-01), None

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