Radiant energy – Inspection of solids or liquids by charged particles – Methods
Reexamination Certificate
2007-05-11
2009-10-06
Berman, Jack I (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Methods
C250S306000, C250S310000, C250S311000, C250S492200, C382S145000, C382S148000, C382S149000
Reexamination Certificate
active
07598490
ABSTRACT:
In order to achieve high throughput in a SEM-type defect-reviewing apparatus and method for automatically acquiring images of review defects present on samples, including: a cell comparison step subdivided into the steps of (a) providing a defect detection success ratio or defect detection success map due to at least a cell comparison scheme for each wafer or each chip, (b) selecting a review sequence of either the cell comparison scheme or a die comparison scheme on the basis of the provided defect detection success ratio or defect detection success map, (c) if the cell comparison scheme is selected, judging whether detection of the review defect is possible by executing the cell comparison scheme; and a die comparison step in which die comparison is performed if the judgment result indicates that the detection of the review defect is impossible, or if the die comparison scheme is selected in the selection step.
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Honda Toshifumi
Kurihara Masaki
Nakagaki Ryo
Antonelli, Terry Stout & Kraus, LLP.
Berman Jack I
Hitachi High-Technologies Corporation
Purinton Brooke
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