4. Pumps
  5. Electrical or getter type
  6. Ionic with gettering

Andrej S Mitrovic

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Closed-drift hall effect plasma vacuum pump for process...

Pumps – Electrical or getter type – Ionic with gettering
Reexamination Certificate

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Method and system for monitoring RF impedance to determine...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With measuring – sensing – detection or process control means
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Plasma chamber wall segment temperature control

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With heating or cooling means for apparatus part other than...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2816740

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