Coating processes – Spray coating utilizing flame or plasma heat – Metal oxide containing coating
Reexamination Certificate
2004-07-22
2011-11-29
Hassanzadeh, Parviz (Department: 1716)
Coating processes
Spray coating utilizing flame or plasma heat
Metal oxide containing coating
C118S715000, C118S724000, C118S725000, C427S248100, C427S255700, C427S446000, C427S447000, C427S448000, C427S449000, C427S450000, C427S451000, C427S452000, C427S454000, C427S455000, C427S456000, C427S255290, C427S255390, C156S345520
Reexamination Certificate
active
08067067
ABSTRACT:
Disclosed herein is a method for applying plasma-resistant coatings for use in semiconductor processing apparatus. The coatings are applied over a substrate which typically comprises an aluminum alloy of the 2000 series or the 5000 through 7000 series. The coating typically comprises an oxide or a fluoride of Y, Sc, La, Ce, Eu, Dy, or the like, or yttrium-aluminum-garnet (YAG). The coating may further comprise about 20 volume % or less of Al2O3. The coatings are typically applied to a surface of an aluminum alloy substrate or an anodized aluminum alloy substrate using a technique selected from the group consisting of thermal/flame spraying, plasma spraying, sputtering, and chemical vapor deposition (CVD). To provide the desired corrosion resistance, it is necessary to place the coating in compression. This is accomplished by controlling deposition conditions during application of the coating.
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Dempster Jim
Sun Jennifer Y.
Thach Senh
Xu Li
Applied Materials Inc.
Church, Esq. Shirley L.
Dhingra Rakesh
Hassanzadeh Parviz
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