Chuck plate assembly with cooling means

Photocopying – Projection printing and copying cameras – Detailed holder for original

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C355S030000, C204S298090, C204S298110, C118S720000

Reexamination Certificate

active

07548304

ABSTRACT:
The invention provides a chuck plate assembly that includes a shadow mask formed with a predetermined pattern; a shadow mask frame holding the shadow mask and having heat-radiating and cooling functions; a substrate aligned with the shadow mask and onto which deposition materials from a deposition source are deposited; and a chuck plate, attaching the substrate to the shadow mask, that includes a refrigerant circulating duct. The temperature of the substrate is optimized in consideration of the temperature of the shadow mask so that an alignment error due to thermal deformation is minimized. That is, the temperature of the shadow mask itself is prevented from rising, and thereby prevents deformation of the shadow mask due to thermal expansion, which improves the precision of a substrate pattern position.

REFERENCES:
patent: 2002/0062791 (2002-05-01), Ginovker et al.
patent: 2004/0089232 (2004-05-01), Sasaki et al.
patent: 2004/0232109 (2004-11-01), Yoshinaga
patent: 1384796 (2004-01-01), None
patent: 2002-008859 (2002-01-01), None
patent: 2002008859 (2002-11-01), None
patent: 20030264223 (2003-09-01), None
patent: 20040107723 (2004-04-01), None
patent: 1020020024618 (2002-04-01), None
patent: 1020040026266 (2004-03-01), None
patent: WO03020999 (2003-03-01), None
English Translation of JP 2002-008859 (dated Jan. 11, 2002).

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Chuck plate assembly with cooling means does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Chuck plate assembly with cooling means, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Chuck plate assembly with cooling means will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-4109414

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.