Photocopying – Projection printing and copying cameras – Detailed holder for original
Reexamination Certificate
2005-12-12
2009-06-16
Mathews, Alan A (Department: 2851)
Photocopying
Projection printing and copying cameras
Detailed holder for original
C355S030000, C204S298090, C204S298110, C118S720000
Reexamination Certificate
active
07548304
ABSTRACT:
The invention provides a chuck plate assembly that includes a shadow mask formed with a predetermined pattern; a shadow mask frame holding the shadow mask and having heat-radiating and cooling functions; a substrate aligned with the shadow mask and onto which deposition materials from a deposition source are deposited; and a chuck plate, attaching the substrate to the shadow mask, that includes a refrigerant circulating duct. The temperature of the substrate is optimized in consideration of the temperature of the shadow mask so that an alignment error due to thermal deformation is minimized. That is, the temperature of the shadow mask itself is prevented from rising, and thereby prevents deformation of the shadow mask due to thermal expansion, which improves the precision of a substrate pattern position.
REFERENCES:
patent: 2002/0062791 (2002-05-01), Ginovker et al.
patent: 2004/0089232 (2004-05-01), Sasaki et al.
patent: 2004/0232109 (2004-11-01), Yoshinaga
patent: 1384796 (2004-01-01), None
patent: 2002-008859 (2002-01-01), None
patent: 2002008859 (2002-11-01), None
patent: 20030264223 (2003-09-01), None
patent: 20040107723 (2004-04-01), None
patent: 1020020024618 (2002-04-01), None
patent: 1020040026266 (2004-03-01), None
patent: WO03020999 (2003-03-01), None
English Translation of JP 2002-008859 (dated Jan. 11, 2002).
Han Sang Jin
Huh Myung Soo
Jeong Seok Heon
Kang Hee Cheol
Lee Sung Ho
H.C. Park & Associates PLC
Mathews Alan A
Samsung Mobile Display Co., Ltd.
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