4. Coating apparatus
  5. Gas or vapor deposition
  6. Crucible or evaporator structure

Myung Soo Huh

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Chuck plate assembly with cooling means

Photocopying – Projection printing and copying cameras – Detailed holder for original
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Method for in-situ polycrystalline thin film growth

Coating processes – Coating by vapor – gas – or smoke
Reexamination Certificate

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Vapor deposition source and vapor deposition apparatus...

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2161116

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