Chemical vapor deposition metallization processes and...

Details Chemical vapor deposition metallization processes and... Chemical vapor deposition metallization processes and...

2007-02-27

2007-02-27

Estrada, Michelle (Department: 2823)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C438S597000, C438S685000, C257SE21170, C257SE29143

Reexamination Certificate

active

10855114

ABSTRACT:
CVD metallization processes and CVD apparatus used therein are provided. The processes include forming a barrier metal layer on a semiconductor substrate and cooling the semiconductor substrate having the barrier metal layer without breaking vacuum. An additional metal layer may be formed on the cooled barrier metal layer. The in-situ cooling process is preferably performed inside a cooling chamber installed between first and second transfer chambers, which are separated from each other. The barrier metal layer may be formed inside a CVD process chamber attached to the first transfer chamber, and the additional metal layer may be formed inside another CVD process chamber attached to the second transfer chamber.

REFERENCES:
patent: 5989623 (1999-11-01), Chen et al.
patent: 6110828 (2000-08-01), Guo et al.
patent: 6187667 (2001-02-01), Shan et al.
patent: 6200432 (2001-03-01), Kobayashi et al.
patent: 6238533 (2001-05-01), Satipunwaycha et al.
patent: 6579786 (2003-06-01), Schmidbauer et al.
patent: 6589887 (2003-07-01), Dalton et al.
patent: 6905959 (2005-06-01), Ashtiani et al.
patent: 2002/0013049 (2002-01-01), Yang et al.
patent: 2002-058985 (2002-02-01), None
patent: 20020919 (2001-03-01), None
English language abstract of Japanese Publication No. 2002-058985.
English language abstract of Korean Publication No. 20020919.

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