Chemical processor

Details Chemical processor Chemical processor

2005-02-01

2005-02-01

Dang, Phuc T. (Department: 2818)

Active solid-state devices (e.g., transistors, solid-state diode

Thin active physical layer which is

Heterojunction

C257S253000, C257S714000

Reexamination Certificate

active

06849865

ABSTRACT:
An air trap in a blind hole is eliminated by circulating a liquid chemical along a surface-to-be-processed in substantially a given direction at all times and by setting a velocity gradient of the liquid chemical over the surface to 300/second or more thereby eliminating the air trap in the blind hole.

REFERENCES:
patent: 4468127 (1984-08-01), Agosta
patent: 5143018 (1992-09-01), Meakin
patent: 5292373 (1994-03-01), Arita et al.
patent: 6139755 (2000-10-01), Marte et al.
patent: 05-021413 (1993-01-01), None
patent: 05-299406 (1993-11-01), None

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