4. Active solid-state devices (e.g., transistors, solid-state diode
  5. Thin active physical layer which is
  6. Heterojunction

Masaru Kinugawa

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Chemical processing method, and method of manufacturing...

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
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Chemical processor

Active solid-state devices (e.g. – transistors – solid-state diode – Thin active physical layer which is – Heterojunction
Reexamination Certificate

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