Chemical processing method, and method of manufacturing...

Details Chemical processing method, and method of manufacturing... Chemical processing method, and method of manufacturing...

2006-01-31

2006-01-31

Nelms, David (Department: 2818)

Semiconductor device manufacturing: process

Chemical etching

Liquid phase etching

C438S906000, C438S974000

Reexamination Certificate

active

06992016

ABSTRACT:
Air trapped in a blind hole during processing of the blind hole with a liquid is eliminated by circulating the liquid along a surface-to-be-processed in substantially a single direction at all times and by setting a velocity gradient of the liquid over the surface to at least 300/second.

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patent: 5-21413 (1993-01-01), None
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