Chemical mechanical polishing system having multiple...

Details Chemical mechanical polishing system having multiple... Chemical mechanical polishing system having multiple...

2007-06-07

2009-11-10

Eley, Timothy V (Department: 3724)

Abrading

Machine

Combined

C451S137000, C451S140000, C451S146000, C451S274000, C451S288000, C451S290000

Reexamination Certificate

active

07614939

ABSTRACT:
A chemical-mechanical polishing apparatus including a table top, a transfer station mounted on the table top, a plurality of polishing stations mounted on the table top, a plurality of washing stations, and a plurality of carrier heads supported by a support member rotatable about an axis. Each washing station is located between a first polishing station and either a second polishing station or the transfer station, and the transfer station and the plurality of polishing stations are arranged at approximately equal angular intervals about the axis.

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