4. Semiconductor device manufacturing: process
  5. Chemical etching

Yanghua He

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Chemical mechanical polishing pad having improved groove...

Abrading – Flexible-member tool – per se – Interrupted or composite work face
Reexamination Certificate

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Edge-sealed pad for CMP process

Abrading – Machine – Rotary tool
Reexamination Certificate

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Edge-sealed pad for CMP process

Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate

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Method for chemical mechanical planarization of a metal...

Semiconductor device manufacturing: process – Chemical etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2171788

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