Abrasive tool making process – material – or composition – With inorganic material
Reexamination Certificate
2003-05-12
2010-06-15
Lorengo, Jerry (Department: 1793)
Abrasive tool making process, material, or composition
With inorganic material
C051S309000, C106S003000, C106S005000, C438S692000, C438S693000, C216S105000, C216S106000
Reexamination Certificate
active
07736405
ABSTRACT:
A CMP composition containing a rheology agent, e.g., in combination with oxidizing agent, chelating agent, inhibiting agent, abrasive and solvent. Such CMP composition advantageously increases the materials selectivity in the CMP process and is useful for polishing surfaces of copper elements on semiconductor substrates, without the occurrence of dishing or other adverse planarization deficiencies in the polished copper.
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Boggs Karl
Darsillo Michael
Wrschka Peter
Abu Ali Shuangyi
Advanced Technology & Materials Inc.
Fuierer Tristan A.
Lin Chih-Sheng (Jason)
Lorengo Jerry
LandOfFree
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