Chemical mechanical polishing apparatus with rotating belt

Details Chemical mechanical polishing apparatus with rotating belt Chemical mechanical polishing apparatus with rotating belt

2007-12-04

2007-12-04

Nguyen, Dung Van (Department: 3723)

Abrading

Machine

Endless band tool

C451S307000, C451S289000

Reexamination Certificate

active

11531272

ABSTRACT:
A chemical mechanical polishing apparatus has a movable platen, a drive mechanism and a chucking mechanism. The drive mechanism is attached to the platen, is configured to support a generally linear polishing sheet with a portion of the polishing sheet extending over the platen, and is configured to incrementally advance the polishing sheet in a linear direction relative to the platen. The chucking mechanism is configured to intermittently secure the portion of the polishing sheet to the platen.

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