Chemical mechanical polishing apparatus with rotating belt

Details Chemical mechanical polishing apparatus with rotating belt Chemical mechanical polishing apparatus with rotating belt

2006-09-12

2006-09-12

Nguyen, Dung Van (Department: 3723)

Abrading

Machine

Endless band tool

C451S307000

Reexamination Certificate

active

07104875

ABSTRACT:
A chemical mechanical polishing apparatus has a rotatable platen, a polishing sheet that is wider than the substrate extending between two reels, a drive mechanism to advance the polishing sheet, and a chucking mechanism to intermittently secure the polishing sheet to the platen. The platen can have a platen base that is adaptable to receive either a circular platen top or a rectangular platen top.

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