Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2006-07-11
2006-07-11
Lee, John R. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S311000, C250S3960ML
Reexamination Certificate
active
07075075
ABSTRACT:
The invention provides a deflecting system for deflecting a charged particle beam from a first direction to a second direction, the deflecting system comprising a first deflector for deflecting said charged particle beam off the first direction within a first deflection plane; a second deflector for deflecting the deflected charged particle beam into the second direction within the first deflection plane; and at least one deflecting pair of correcting coils comprising two correction coils which is positioned and shaped to reduce an astigmatism of the charged particle beam caused by the deflections.
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Adamec Pavel
Munack Harry
ICT Integrated Circuit Testing Gesellschaft, fur Halbleiterpruft
Lee John R.
Patterson & Sheridan LLP
Souw Bernard E.
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