4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Electron probe type

Harry Munack

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Charged particle beam apparatus and method for operating the...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Charged particle beam apparatus and method for operating the...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Charged particle deflecting system

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Multi beam charged particle device

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2810751

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