Charged particle beam system

Details Charged particle beam system Charged particle beam system

2007-03-21

2010-12-14

Berman, Jack I (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S306000, C250S307000, C250S311000, C324S754120

Reexamination Certificate

active

07851754

ABSTRACT:
A charged particle beam system wherein the output of the secondary electron detector is detected while the retarding voltage is varied between the values for which the secondary electrons do not reach the sample and the values for which the secondary electrons reach the sample, and the surface potential of the sample is determined on the basis of the relationship between the retarding voltage and the detected output of the secondary electron detector.

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Japanese Office Action, w/ partial English translation thereof, issued in Japanese Patent Application No. JP 2006-079908 dated Jun. 15, 2010.

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