Charged particle beam scanning method and charged particle...

Details Charged particle beam scanning method and charged particle... Charged particle beam scanning method and charged particle...

2007-08-22

2009-10-06

Nguyen, Kiet T (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C250S310000

Reexamination Certificate

active

07598497

ABSTRACT:
A method and an apparatus for calculating a scan signal so that the scan region becomes a scan region which is based on magnification ratio between desired magnification in a scan-line interval direction and desired magnification in a scan-line direction, and performing a calculation for rotating the scan direction with respect to the scan signal in order to suppress a distortion which is caused to occur when the technology where the scan direction of a charged particle beam is rotated is applied to the technology where the charged particle beam is scanned such that the scan-line interval is enlarged.

REFERENCES:
patent: 7375330 (2008-05-01), Inada et al.
patent: 2004/0051040 (2004-03-01), Nasu et al.
patent: 2008/0093551 (2008-04-01), Tsuneta et al.
patent: 10-003876 (1998-01-01), None

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