Charged particle beam microscope with minicolumn

Details Charged particle beam microscope with minicolumn Charged particle beam microscope with minicolumn

2006-07-11

2006-07-11

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

C250S310000, C250S311000, C250S398000, C250S42300F

Reexamination Certificate

active

07075092

ABSTRACT:
One embodiment of the present invention is an electron microscope that includes: (a) a main vacuum chamber housing a stage therein and connected to a vacuum pump; (b) a load lock for loading a specimen into said main vacuum chamber; (c) a minicolumn non-translatably positioned inside said main chamber; and (d) a vacuum pump situated inside the main vacuum chamber and external to and connected to the minicolumn.

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