Charged-particle-beam exposure device and charged-particle-beam

Details Charged-particle-beam exposure device and charged-particle-beam Charged-particle-beam exposure device and charged-particle-beam

1997-08-08

1999-02-16

Nguyen, Kiet T.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

2505051, H01J 3709

Patent

active

058723668

ABSTRACT:
An electron gun for emitting an electron beam traveling along a beam axis includes a cathode having a tip, the tip having substantially a circular conic shape and a tip surface substantially at the beam axis, the cathode being applied with a first voltage, an anode having a first aperture substantially on the beam axis and being applied with a second voltage higher than the first voltage, a control electrode having a second aperture substantially on the beam axis and being applied with a voltage lower than the first voltage to control a current of the cathode, the second aperture being larger than the tip surface, a guide electrode having a third aperture substantially on the beam axis, being arranged between the cathode and the anode, and being applied with a voltage higher than the first voltage and lower than the second voltage, the third aperture being smaller than the tip surface, and a lens electrode having a fourth aperture substantially on the beam axis, being arranged between the guide electrode and the anode, and being applied with a voltage lower than the first voltage to form a cross-over image of the electron beam, the fourth aperture being larger than the third aperture.

REFERENCES:
patent: 3614520 (1971-10-01), Coleman
patent: 4926055 (1990-05-01), Miyokowa
patent: 5350920 (1994-09-01), Fukuyama et al.

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