Charged particle beam equipment

Details Charged particle beam equipment Charged particle beam equipment

2011-04-12

2011-04-12

Kim, Robert (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

C250S306000, C250S307000, C250S309000, C250S310000, C250S311000, C702S085000

Reexamination Certificate

active

07923701

ABSTRACT:
Charged particle beam equipment has a processing unit for calibrating dimension values of an enlarged specimen image, and means for changing the amount by which a charged particle beam is scanned. Also, a specimen stand has a mechanism for holding a specimen having a periodical structure or a specimen simultaneously having a periodical structure and a non-periodical structure, and a storage device for automatically changing a magnification for an enlarged specimen image, and storing measured values at all magnifications.

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Japanese Office Action issued in Japanese Patent Application No. JP 2005-108765 dated Nov. 4, 2009.

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