Charged particle beam equipment

Radiant energy – Inspection of solids or liquids by charged particles

Reexamination Certificate

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Details

C250S310000, C250S311000, C250S398000, C250S397000, C250S3960ML, C250S492200, C250S492300, C250S442110

Reexamination Certificate

active

07655905

ABSTRACT:
Charged particle beam equipment having a rotary mechanism in which shift of the observing/machining position incident to the rotary operation of the equipment having the rotary mechanism can be corrected conveniently with high precision in a plane perpendicular to the optical axis of the optical system of charged particle beam or in a slightly inclining plane. An X-Y shift incident to rotation in a plane is determined from the angular information of a rotary mechanism such as a sample holder, diaphragms or biprisms in the charged particle beam equipment, and then driving or controlling is performed to cancel the X-Y shift.

REFERENCES:
patent: 6444991 (2002-09-01), Yamada et al.
patent: 7071475 (2006-07-01), Tomimatsu et al.
patent: 7244932 (2007-07-01), Nakasuji et al.
patent: 7439502 (2008-10-01), Nakasuji et al.
patent: 5-323859 (1993-12-01), None
patent: 8-153485 (1996-06-01), None
patent: 11-40097 (1999-02-01), None
patent: 2001-35433 (2001-02-01), None

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