Charged particle beam equipment

Details Charged particle beam equipment Charged particle beam equipment

2006-05-11

2010-02-02

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

C250S310000, C250S311000, C250S398000, C250S397000, C250S3960ML, C250S492200, C250S492300, C250S442110

Reexamination Certificate

active

07655905

ABSTRACT:
Charged particle beam equipment having a rotary mechanism in which shift of the observing/machining position incident to the rotary operation of the equipment having the rotary mechanism can be corrected conveniently with high precision in a plane perpendicular to the optical axis of the optical system of charged particle beam or in a slightly inclining plane. An X-Y shift incident to rotation in a plane is determined from the angular information of a rotary mechanism such as a sample holder, diaphragms or biprisms in the charged particle beam equipment, and then driving or controlling is performed to cancel the X-Y shift.

REFERENCES:
patent: 6444991 (2002-09-01), Yamada et al.
patent: 7071475 (2006-07-01), Tomimatsu et al.
patent: 7244932 (2007-07-01), Nakasuji et al.
patent: 7439502 (2008-10-01), Nakasuji et al.
patent: 5-323859 (1993-12-01), None
patent: 8-153485 (1996-06-01), None
patent: 11-40097 (1999-02-01), None
patent: 2001-35433 (2001-02-01), None

Affiliated with

Also associated with

Rating

Charged particle beam equipment does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Charged particle beam equipment, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Charged particle beam equipment will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4163594