Charged particle beam equipment

Details Charged particle beam equipment Charged particle beam equipment

2008-05-20

2008-05-20

Kim, Robert (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S306000, C250S307000, C250S309000, C250S311000, C702S085000

Reexamination Certificate

active

07375330

ABSTRACT:
Charged particle beam equipment has a processing unit for calibrating dimension values of an enlarged specimen image, and means for changing the amount by which a charged particle beam is scanned. Also, a specimen stand has a mechanism for holding a specimen having a periodical structure or a specimen simultaneously having a periodical structure and a non-periodica structure, and a storage device for automatically changing a magnification for an enlarged specimen image, and storing measured values at all magnifications.

REFERENCES:
patent: 6596993 (2003-07-01), Sicignano et al.
patent: 2003/0039386 (2003-02-01), Ishitani et al.
patent: 2005/0189501 (2005-09-01), Sato et al.
patent: 2006/0151697 (2006-07-01), Inada et al.
patent: 2002-15691 (2002-01-01), None

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