Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2007-09-25
2007-09-25
Nguyen, Kiet T. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S307000
Reexamination Certificate
active
11396751
ABSTRACT:
A charged particle beam apparatus is provided which comprises a charged particle source for producing a primary beam of charged particles, aperture means for collimating said primary beam of charged particles, wherein said aperture means is adapted to switch between a collimation of said primary beam resulting in a width appropriate for serial imaging of a sample as well as a collimation of said primary beam to a width appropriate for parallel imaging of said sample, a condenser lens for condensing said primary beam of charged particles, scanning means for deflecting said primary beam of charged particles, an objective lens for focusing said condensed primary beam, a sectorized detector for detecting a secondary charged particles. Also, several different operation modes of the beam apparatus are described allowing for serial imaging as well as parallel imaging.
REFERENCES:
patent: 7045781 (2006-05-01), Adamec et al.
Adamec Pavel
Degenhardt Ralf
Feuerbaum Hans-Peter
Munack Harry
Winkler Dieter
ICT Integrated Circuit Testing Gesellschaft, fur Halbleiterpruft
Nguyen Kiet T.
Patterson & Sheridan LLP
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