Charged particle beam apparatus

Details Charged particle beam apparatus Charged particle beam apparatus

2008-03-04

2008-03-04

Kim, Robert (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S441110, C250S289000, C250S306000, C250S307000, C250S309000

Reexamination Certificate

active

11196399

ABSTRACT:
A charged particle beam apparatus in which an electrostatic lens is used as a main focusing element to obtain a subminiature high-sensitivity high-resolution SEM, a drift tube for an electron beam is located inside a column between an electron source and a sample, and a detector for secondary electrons is located inside the drift tube. This solves the problem associated with the provision of a secondary electron detector, which heretofore has been a bottleneck in making a subminiature high-resolution SEM column.

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