Charged particle beam apparatus

Details Charged particle beam apparatus Charged particle beam apparatus

2007-04-17

2007-04-17

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S306000, C250S311000, C250S400000, C250S442110

Reexamination Certificate

active

11305231

ABSTRACT:
An object of this invention is to provide a charged particle beam apparatus that is capable of handling samples without adhering impurities onto the samples. In a scanning electron microscope in which a lubricant was coated on a sliding portion of a movable member that moves inside a vacuum chamber, a substance from which low molecular components were removed is used as the lubricant. It is thus possible to inhibit sample contamination and suppress the occurrence of defects in a process following measurement of the samples.

REFERENCES:
patent: 3790155 (1974-02-01), Longamore
patent: 4587431 (1986-05-01), Uemura
patent: 5493125 (1996-02-01), Okayama et al.
patent: 6603130 (2003-08-01), Bisschops et al.
patent: 6744054 (2004-06-01), Mizuochi et al.
patent: 2002/0088940 (2002-07-01), Watanabe et al.
patent: 5-135725 (1993-06-01), None
patent: 2004-259448 (2004-09-01), None

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