Charged particle beam apparatus

Details Charged particle beam apparatus Charged particle beam apparatus

1992-07-15

1994-06-28

Dzierzynski, Paul M.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

250310, H01J 37252

Patent

active

053249500

ABSTRACT:
Improvements in a charged particle beam apparatus are contemplated and especially a column structure incorporating a superhigh vacuum evacuation system is provided which is reduced in size and weight and has high performance. In order to evacuate surrounding space of a charged particle source to superhigh vacuum, ion pumps are built in a vacuum enclosure of a column. Each ion pump includes a magnet unit 15, a yoke and an electrode, and the magnet unit per se is built in the vacuum enclosure. A charged particle beam focusing optics for focusing and deflecting a charged particle beam from the charged particle beam source is arranged in a space which is defined interiorly of the yoke. The column structure can be reduced in size and weight and a charged particle beam apparatus having high performance can be obtained.

REFERENCES:
patent: 2899556 (1959-08-01), Schopper et al.
patent: 3969039 (1976-07-01), Shoulders
patent: 4295072 (1981-10-01), Todokoro et al.
patent: 4823006 (1989-04-01), Danilatos et al.
patent: 4833362 (1989-05-01), Crewe
Yamazaki, Y. et al., "Development of the field emission electron gun integrated in the sputter ion pump", Journal of Vacuum Science and Technology: Part B, vol. 9, No. 6, Dec. 1991, pp. 2967-2971.

Affiliated with

Also associated with

Rating

Charged particle beam apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Charged particle beam apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Charged particle beam apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2378873