Catalyst for microelectromechanical systems microreactors

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Reexamination Certificate

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C216S002000

Reexamination Certificate

active

08057988

ABSTRACT:
A microreactor comprising a silicon wafer, a multiplicity of microchannels in the silicon wafer, and a catalyst coating the microchannels. In one embodiment the catalyst coating the microchannels comprises a nanostructured material. In another embodiment the catalyst coating the microchannels comprises an aerogel. In another embodiment the catalyst coating the microchannels comprises a solgel. In another embodiment the catalyst coating the microchannels comprises carbon nanotubes.

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English language translation of DE 198 41 993 (Mar. 2000).

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