Polarization mirau interference microscope

Details Polarization mirau interference microscope Polarization mirau interference microscope

2008-07-01

2011-12-06

Chowdhury, Tarifur (Department: 2886)

Optics: measuring and testing

By light interference

Having polarization

Reexamination Certificate

active

08072610

ABSTRACT:
The conventional two plates with beamsplitter of the Mirau interferometer are replaced with two achromatic λ/4 retarders. The upper surface of the second retarder is coated with a 50 percent reflecting film, so that it also functions as a beamsplitter. The objective is illuminated with a linearly polarized beam. As a result of this arrangement, the test and reference beam emerging from the Mirau interferometer are orthogonally polarized beams suitable for achromatic phase shifting, thereby facilitating the use of the Mirau interferometer for monochromatic to broadband phase-shifting interference microscopy. Alternatively, it can be used for equalization of beams intensity by placing a rotatable polarizer at the exit of the objective.

REFERENCES:
patent: 4948253 (1990-08-01), Biegen
Daniel Malacara, “Optical Shop Testing”, 2007, John Wiley and Sons Inc. Third Edition, p. 735-741.
Grant Fowles, “Introduction to Modern Optics”, 1975, Dover Publications, Second Edition, p. 32-33.

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