Catadioptric reduction lens

Details Catadioptric reduction lens Catadioptric reduction lens

2006-02-28

2006-02-28

Sugarman, Scott J. (Department: 2873)

Optical: systems and elements

Lens

With reflecting element

C359S364000, C359S649000

Reexamination Certificate

active

07006304

ABSTRACT:
A catadioptric projection lens configured for imaging a pattern arranged in an object plane (2) onto an image plane (4) while creating a single, real, intermediate image (3) has a catadioptric imaging group (5) having a concave mirror (6) and a beam-deflector (7), and a dioptric imaging lens group (20) that commences after the beam-deflector. The system is configured such that the intermediate image follows the first lens (17) of a dioptric section (8) and is preferably readily accessible. Arranging the intermediate image both between a pair of lenses (17, 21) of the dioptric section and at a large distance behind the final reflective surface of the beam-deflector helps to avoid imaging aberrations.

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