4. Optical: systems and elements
  5. Lens
  6. With reflecting element

Helmut Beierl

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Catadioptric objective with physical beam splitter

Optical: systems and elements – Lens – With reflecting element
Reexamination Certificate

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Catadioptric optical system and exposure apparatus having...

Optical: systems and elements – Having significant infrared or ultraviolet property – Lens – lens system or component
Reexamination Certificate

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Catadioptric optical system and exposure apparatus having...

Optical: systems and elements – Having significant infrared or ultraviolet property – Lens – lens system or component
Reexamination Certificate

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Catadioptric optical system and exposure apparatus having...

Optical: systems and elements – Compound lens system – With curved reflective imaging element
Reexamination Certificate

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Catadioptric projection objective with geometric beam splitting

Optical: systems and elements – Lens – With reflecting element
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2501092

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