Catadioptric projection objective with geometric beam splitting

Details Catadioptric projection objective with geometric beam splitting Catadioptric projection objective with geometric beam splitting

2005-11-21

2008-09-16

Choi, William C (Department: 2873)

Optical: systems and elements

Lens

With reflecting element

C359S364000, C359S649000

Reexamination Certificate

active

07426082

ABSTRACT:
A projection exposure lens has an object plane, optical elements for separating beams, a concave mirror, an image plane, a first lens system arranged between the object plane and the optical elements for separating beams, a second double pass lens system arranged between the optical elements for separating beams and the concave mirror, a third lens system arranged between the optical elements for separating beams and the image plane. The second lens system has a maximum of five lenses.

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