Optical: systems and elements – Lens – With field curvature shaping
Reexamination Certificate
2005-01-11
2005-01-11
Schwartz, Jordan M. (Department: 2873)
Optical: systems and elements
Lens
With field curvature shaping
C359S726000
Reexamination Certificate
active
06842294
ABSTRACT:
A catadioptric objective comprises a plurality of lenses and at least two deflecting mirrors that have reflecting surfaces that are at a specific angle, in particular of 90°, to one another. The two deflecting mirrors are arranged with their reflecting surfaces on a common base member whose position in the objective can be set.
REFERENCES:
patent: 3655264 (1972-04-01), Pickett
patent: 5559629 (1996-09-01), Sheets et al.
patent: 5581413 (1996-12-01), Anderson
patent: 5805356 (1998-09-01), Chiba
patent: 5959784 (1999-09-01), Seki et al.
patent: 6195213 (2001-02-01), Omura et al.
patent: 20030011755 (2003-01-01), Omura et al.
patent: 10-96981 (1998-04-01), None
patent: WO 95309818 (1995-11-01), None
Gellrich Bernhard
Gruner Toralf
Holderer Hubert
Kohl Alexander
Muenker Hartmut
Carl Zeiss SMT AG
Schwartz Jordan M.
Welsh & Katz Ltd.
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