Carrier head with multiple chambers

Details Carrier head with multiple chambers Carrier head with multiple chambers

2007-04-24

2007-04-24

Nguyen, Dung Van (Department: 3723)

Abrading

Machine

Rotary tool

C451S289000, C451S388000

Reexamination Certificate

active

11245867

ABSTRACT:
A system for chemical mechanical polishing having a carrier head with pressurizeable chambers that can be configured into pressure zones is described. The system includes a carrier head with a membrane for contacting a substrate during polishing. Pressurizeable chambers behind the membrane are in communication with pressure inputs. The pressure inputs can each supply a different pressure to the pressurizeable chambers. Some of the pressurizeable chambers can be in communication with more than one pressure input. Zones of pressure can be arranged, where each zone includes one or more pressurizeable chambers. The zones can be configurable by altering the pressurizeable chambers that make up each zone.

REFERENCES:
patent: 5605488 (1997-02-01), Ohashi et al.
patent: 5762539 (1998-06-01), Nakashiba et al.
patent: 6390905 (2002-05-01), Korovin et al.
patent: 6764387 (2004-07-01), Chen
patent: 6872131 (2005-03-01), Brown
patent: 6926585 (2005-08-01), Togawa
patent: 2002/0042246 (2002-04-01), Togawa et al.

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