4. Abrading
  5. Machine
  6. Rotary tool

Steven T. Mear

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Carrier head with controllable edge pressure

Abrading – Machine – Rotary tool
Reexamination Certificate

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Carrier head with multiple chambers

Abrading – Machine – Rotary tool
Reexamination Certificate

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CMP platen with patterned surface

Abrading – Machine – Rotary tool
Reexamination Certificate

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CMP platen with patterned surface

Abrading – Machine – Combined
Reexamination Certificate

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CMP polishing pad

Abrading – Machine – Rotary tool
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2106789

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