Carrier head with flexible membrane to provide controllable...

Details Carrier head with flexible membrane to provide controllable... Carrier head with flexible membrane to provide controllable...

2005-12-27

2005-12-27

Nguyen, George (Department: 3723)

Abrading

Abrading process

Glass or stone abrading

C451S285000, C451S288000, C451S289000, C451S398000, C451S388000

Reexamination Certificate

active

06979250

ABSTRACT:
A carrier head for a chemical mechanical polishing apparatus includes a flexible membrane that applies a controllable load to a substrate in an area with a controllable inner diameter.

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