4. Abrading
  5. Work holder
  6. Vacuum

Ming Kuie Tseng

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Carrier head with flexible membrane to provide controllable...

Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate

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Carrier head with flexible membranes to provide controllable...

Abrading – Machine – Rotary tool
Reexamination Certificate

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Carrier head with multi-part flexible membrane

Abrading – Work holder – Vacuum
Reexamination Certificate

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Methods for carrier head with multi-part flexible membrane

Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate

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