Carrier head with a substrate detection mechanism for a chemical

Details Carrier head with a substrate detection mechanism for a chemical Carrier head with a substrate detection mechanism for a chemical

1997-05-23

1999-09-28

Eley, Timothy V.

Abrading

Precision device or process - or with condition responsive...

With indicating

451289, 451398, B24B 4900

Patent

active

059577517

ABSTRACT:
A carrier head for a chemical mechanical polishing system includes a substrate sensing mechanism. The carrier head includes a base and a flexible member connected to the base to define a chamber. A lower surface of the flexible member provides a substrate receiving surface. The substrate sensing mechanism includes a sensor to measure a pressure in the chamber and generate an output signal representative thereof, and a processor configured to indicate whether the substrate is attached to the substrate receiving surface in response to the output signal.

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